The production of modern precision optics places very high demands on the quality inspection process. To meet this challenge, not only a capable metrology but also a robust and comprehensive evaluation of the measurement data must be provided in order to inspect the quality of the specimens. This becomes particularly apparent when one considers how topographic data is used to compensate for manufacturing errors.
The Fraunhofer IPT has been active in the field of optics manufacturing and inspection for many years and has a wellfounded understanding of the evaluation of measured data. The work focuses on the development of individual, user-specific data processing software solutions and their modification and integration into existing evaluation programs.